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Surface passivation technique for selective hole filling by chemical vapor deposition SCIE SCOPUS
- Title
- Surface passivation technique for selective hole filling by chemical vapor deposition
- Date Issued
- 1998-06-01
- Publisher
- KLUWER ACADEMIC PUBL
- Keywords
- DIMETHYLETHYLAMINE ALANE; TITANIUM; FILMS
- ISSN
- 0261-8028
- Article Type
- Article
- Citation
- JOURNAL OF MATERIALS SCIENCE LETTERS, vol. 17, no. 11, page. 947 - 949, 1998-06-01
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