Open Access System for Information Sharing

Login Library

 

Article
Cited 8 time in webofscience Cited 8 time in scopus
Metadata Downloads

Analytical studies on the crystal-melt interface shape in the Czochralski process SCIE SCOPUS

Title
Analytical studies on the crystal-melt interface shape in the Czochralski process
Authors
Jeong, JHOh, JKang, IS
Date Issued
1997-06
Publisher
ELSEVIER SCIENCE BV
Abstract
Analytical studies are performed to understand the effects of various operating conditions on the crystal-melt interface shape in the Czochralski process. The temperature field in the crystal region with curved bottom is obtained by using the domain perturbation method. For the temperature field in the melt phase, the well-known results from the thermal boundary layer analysis are applied based on the idea that the flow held near the crystal-melt interface can be modeled as either a biaxial or a uniaxial flow with azimuthal velocity component. The interface shape is approximated in the simplest form as a quadratic function of radial position and an expression for the deviation from the flat interface shape is derived as a function of operating conditions. The analytical predictions agree qualitatively with the experimental and numerical results reported elsewhere.
Keywords
GROWTH; SILICON; MODEL
URI
https://oasis.postech.ac.kr/handle/2014.oak/21272
DOI
10.1016/S0022-0248(96)01095-0
ISSN
0022-0248
Article Type
Article
Citation
JOURNAL OF CRYSTAL GROWTH, vol. 177, no. 3-4, page. 303 - 314, 1997-06
Files in This Item:
There are no files associated with this item.

qr_code

  • mendeley

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

Related Researcher

Researcher

강인석KANG, IN SEOK
Dept. of Chemical Enginrg
Read more

Views & Downloads

Browse