Fabrication and performance of 2-D compound X-ray refractive lenses
SCIE
SCOPUS
- Title
- Fabrication and performance of 2-D compound X-ray refractive lenses
- Authors
- Chang, SS; Lee, JP; Kim, GB; Lee, SJ; Kim, JH
- Date Issued
- 2008-10
- Publisher
- SPRINGER
- Abstract
- Due to the weak refraction of X-rays in matter, a focusing or deflection of X-ray using conventional refractive optics was not feasible. However, since compound X-ray refractive lens (CXRL) with consecutive holes array was proposed, it becomes currently a noticeable issue in X-ray optics. In this paper, we report on fabrication and performance test of two types of PMMA (polymethyl methacrylate) CXRLs. Firstly, one dimensional refractive X-ray lenses of parabolic and circular shape is fabricated by LIGA process. Based on the results, we conduct a fabrication of 2-D CXRLs. Here we suggest a LIGA-self align method which doesn't need a special align equipment and is simpler method than conventional one. Through performance tests, we show experimentally that CXRLs are novel optical components for the hard X-ray range of about 8 keV and that they have possibilities to apply the X-ray optics for micro-focusing, imaging, and lithography.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/22574
- DOI
- 10.1007/s00542-008-0676-2
- ISSN
- 0946-7076
- Article Type
- Article
- Citation
- MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, vol. 14, no. 9-11, page. 1657 - 1661, 2008-10
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