DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, PK | - |
dc.contributor.author | Kim, MS | - |
dc.contributor.author | Lim, G | - |
dc.date.accessioned | 2016-04-01T01:32:39Z | - |
dc.date.available | 2016-04-01T01:32:39Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 2007-09-12 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.other | 2007-OAK-0000007181 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/23166 | - |
dc.description.abstract | Despite the numerous advantages of a glass, difficulty of the fabrication, especially 3D fabrication, is still an obstacle. Here, we show a novel method to fabricate Pyrex glass in a simple and precise way. Combining conventional MEMS processes and a heat and electric field treatment, the Pyrex glass etching is realized by aluminum substitution for boron. Maximum depth and etching rate are influenced by temperature, applied voltage and aluminum thickness. By applying a range of voltages to different spot patterns or varying the thickness of the aluminum pattern, we were able to control the depth on a single substrate. (c) 2006 Elsevier B.V. All rights reserved. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.relation.isPartOf | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.subject | glass fabrication | - |
dc.subject | 3D fabrication | - |
dc.subject | heat and electric field treatment | - |
dc.subject | image mirroring | - |
dc.subject | aluminum substitution | - |
dc.subject | depth control | - |
dc.subject | SENSOR | - |
dc.title | 3D glass fabrication utilizing electric field and heat treatment induced image mirroring | - |
dc.type | Article | - |
dc.contributor.college | 기계공학과 | - |
dc.identifier.doi | 10.1016/j.sna.2006.11.021 | - |
dc.author.google | Kim, PK | - |
dc.author.google | Kim, MS | - |
dc.author.google | Lim, G | - |
dc.relation.volume | 139 | - |
dc.relation.issue | 39815 | - |
dc.relation.startpage | 287 | - |
dc.relation.lastpage | 292 | - |
dc.contributor.id | 10097203 | - |
dc.relation.journal | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Conference Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS A-PHYSICAL, v.139, no.39815, pp.287 - 292 | - |
dc.identifier.wosid | 000249678000044 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 292 | - |
dc.citation.number | 39815 | - |
dc.citation.startPage | 287 | - |
dc.citation.title | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.citation.volume | 139 | - |
dc.contributor.affiliatedAuthor | Lim, G | - |
dc.identifier.scopusid | 2-s2.0-34548160292 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 2 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordAuthor | glass fabrication | - |
dc.subject.keywordAuthor | 3D fabrication | - |
dc.subject.keywordAuthor | heat and electric field treatment | - |
dc.subject.keywordAuthor | image mirroring | - |
dc.subject.keywordAuthor | aluminum substitution | - |
dc.subject.keywordAuthor | depth control | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
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