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Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor SCIE SCOPUS
- Title
- Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor
- Date Issued
- 2007-07
- Publisher
- ELSEVIER SCIENCE BV
- ISSN
- 0010-4655
- Article Type
- Article
- Citation
- COMPUTER PHYSICS COMMUNICATIONS, vol. 177, no. 39815, page. 129 - 130, 2007-07
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