NONDESTRUCTIVE QUANTITATIVE SYNCHROTRON GRAZING INCIDENCE X-RAY SCATTERING ANALYSIS OF CYLINDRICAL NANOSTRUCTURES IN SUPPORTED THIN FILMS
SCIE
SCOPUS
- Title
- NONDESTRUCTIVE QUANTITATIVE SYNCHROTRON GRAZING INCIDENCE X-RAY SCATTERING ANALYSIS OF CYLINDRICAL NANOSTRUCTURES IN SUPPORTED THIN FILMS
- Authors
- Yoon, J; Yang, SY; Lee, B; Joo, W; Heo, K; Kim, JK; Ree, M
- Date Issued
- 2007-04
- Publisher
- BLACKWELL PUBLISHING
- Abstract
- Nondestructive nanostructural analysis is indispensable in the development of nanomaterials and nanofabrication processes for use in nanotechnology applications. This paper demonstrates a quantitative, nondestructive analysis of nanostructured thin films supported on substrates and their templated nanopores by using grazing incidence X-ray scattering and data analysis with a derived scattering theory. The analysis disclosed that vertically oriented nanodomain cylinders had formed in 20-100 nm thick films supported on substrates, which consisted of a mixture of poly(styrene-b-methyl methacrylate) (PS-b-PMMA) and PMMA homopolymer, and that the PMMA nanodomain cylinders were selectively etched out by ultraviolet light exposure and a subsequent rinse with acetic acid, resulting in a well ordered nanostructure consisting of hexagonally packed cylindrical nanopores.
- Keywords
- SMALL-ANGLE SCATTERING; ORGANOSILICATE DIELECTRIC FILMS; SIZE DISTRIBUTIONS; DIBLOCK COPOLYMERS; NANOWIRE ARRAYS; POLYMER-FILMS; POLYISOPRENE; MEMBRANES; TEMPLATE
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/23521
- DOI
- 10.1107/S0021889807000817
- ISSN
- 0021-8898
- Article Type
- Article
- Citation
- JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 40, page. 305 - 312, 2007-04
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