Effectiveness of vehicle reassignment in a large-scale overhead hoist transport system

Abstract

This paper proposes an efficient vehicle reassignment dispatching rule and demonstrates the effectiveness of the rule using an overhead hoist transport (OHT) system for a semiconductor fabrication line. The OHT system has more than 150 OHT vehicles and its target vehicle utilization level is 70%. It allows direct delivery such that an inter-bay wafer movement can be accomplished by a single vehicle. Simulation analysis is used to compare the proposed rule with the shortest travel distance first (STDF) rule and existing reassignment-based rules. While STDF rule requires 170 vehicles for the target utilization level, the proposed vehicle reassignment rule requires only 161 vehicles. At the same time, the lead time and the variance of the lead time have been significantly reduced. The proposed rule also improves system performance compared to existing reassignment-based rules.