Syntheses and mechanical properties of Mo-Si-N coatings by a hybrid coating system
SCIE
SCOPUS
- Title
- Syntheses and mechanical properties of Mo-Si-N coatings by a hybrid coating system
- Authors
- Heo, SJ; Kim, KH; Kang, MC; Suh, JH; Park, CG
- Date Issued
- 2006-12-20
- Publisher
- ELSEVIER SCIENCE SA
- Abstract
- In this work, comparative studies on microstructure and mechanical properties between Mo2N and Mo-Si-N coatings were conducted. Ternary Mo-Si-N coatings were deposited on steel substrates (AISI 132) and Si wafers by a hybrid method, where arc ion plating (ALP) technique was combined with a magnetron sputtering technique. Instrumental analyses of X-ray diffractometer (XRD), high-resolution transmission electron microscopy (HRTEM), and X-ray photoelectron spectroscopy (XPS) revealed that the Mo-Si-N coatings must be a composite consisting of fine Mo2N crystallites and amorphous Si3N4. The hardness value of Mo-Si-N coatings significantly increased from 22 GPa Of Mo2N coatings to about 37 GPa with Si content of 10 at.% due to the refinement Of Mo2N crystallites and the composite microstructure characteristics. The average fiction coefficient of the Mo-Si-N coatings gradually decreased from 0.65 to 0.4 with increasing Si content up to 15 at.%. The effects of Si content on microstructure and mechanical properties of Mo-N coatings were systematically investigated. (c) 2006 Elsevier B.V All rights reserved.
- Keywords
- Mo-Si-N; hybrid coating system; microstructure; mechanical properties; NITRIDE THIN-FILMS; MOLYBDENUM NITRIDE; SPUTTERING TECHNIQUES; BIAS VOLTAGE; TRIBOLOGICAL PROPERTIES; SUPERHARD COATINGS; SILICON-NITRIDE; ARC-PVD; DEPOSITION; BEHAVIOR
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/23643
- DOI
- 10.1016/j.surfcoat.2006.08.048
- ISSN
- 0257-8972
- Article Type
- Article
- Citation
- SURFACE & COATINGS TECHNOLOGY, vol. 201, no. 7, page. 4180 - 4184, 2006-12-20
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