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Mechanical properties and residual stress in porous anodic alumina structures SCIE SCOPUS

Title
Mechanical properties and residual stress in porous anodic alumina structures
Authors
Ko, SLee, DJee, SPark, HLee, KHwang, W
Date Issued
2006-12-05
Publisher
ELSEVIER SCIENCE SA
Abstract
In this study, the mechanical properties, such as the modulus, hardness, of anodic aluminum oxide (AAO) structures are measured using the nano-indentation method. Relationship between the mechanical properties and the porosity change is also investigated. Results show that the indentation modulus and hardness of the AAO structure decreases monotically as the hole's size increases. Additionally, we try to evaluate the residual stress that is generated during the anodization process. We find out that there exists residual tensile stress in the specimen structures. (c) 2006 Elsevier B.V. All rights reserved.
Keywords
anodic aluminum oxide; mechanical properties; nanoindentation; OXIDE FILMS; NANOINDENTATION; SUBSTRATE; MEMBRANES; TANTALA
URI
https://oasis.postech.ac.kr/handle/2014.oak/23655
DOI
10.1016/j.tsf.2006.07.169
ISSN
0040-6090
Article Type
Article
Citation
THIN SOLID FILMS, vol. 515, no. 4, page. 1932 - 1937, 2006-12-05
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박현철PARK, HYUN CHUL
엔지니어링 대학원
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