DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, IC | - |
dc.contributor.author | Lee, SJ | - |
dc.date.accessioned | 2016-04-01T01:57:02Z | - |
dc.date.available | 2016-04-01T01:57:02Z | - |
dc.date.created | 2009-08-25 | - |
dc.date.issued | 2006-04-19 | - |
dc.identifier.issn | 0924-4247 | - |
dc.identifier.other | 2006-OAK-0000005871 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/24072 | - |
dc.description.abstract | A miniature thermal shear-stress sensor was fabricated with bulk micromachining techniques and its dynamic performance was evaluated using a rotating disk calibration device. The calibration device consisted of an upper rotating disk and a lower stationary disk separated by a small gap (275 mu m), with the shear-stress sensor flush-mounted on the lower disk. A novel backside connection scheme compatible to the present sensor fabrication process was devised. Rotation of the upper disk caused a circular Couette flow to be generated in the fluid between the disks. The resistance of the fabricated gold (An) sensing element was about 2.5-3.5 Omega, which is suitable for interfacing with a commercial constant temperature anemometer (CTA). The static sensitivity was in the range of 200-800 mV/Pa at an overheat ratio of 0.2. The transient response characteristics of the sensor indicated that natural convection is significant in the low-frequency range. The dynamic frequency response was tested up to 400 Hz; its gain was about -30 dB/decade of the frequency around 400 Hz. The unusual high gain observed in the low-frequency range seems to be due to the natural convection effect. The shear-stress sensor was found to have a large signal to noise ratio (SNR) in the frequency range around 400 Hz, and it expected to have a discernible SNR values over 1 kHz. (c) 2006 Elsevier B.V. All rights reserved. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE SA | - |
dc.relation.isPartOf | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.subject | shear-stress sensors | - |
dc.subject | bulk micromachining | - |
dc.subject | backside connection | - |
dc.subject | frequency response | - |
dc.subject | CALIBRATION | - |
dc.subject | FLOW | - |
dc.title | Characterization of a miniature thermal shear-stress sensor with backside connections | - |
dc.type | Article | - |
dc.contributor.college | 기계공학과 | - |
dc.identifier.doi | 10.1016/j.sna.2006.02.006 | - |
dc.author.google | Kim, IC | - |
dc.author.google | Lee, SJ | - |
dc.relation.volume | 128 | - |
dc.relation.issue | 2 | - |
dc.relation.startpage | 305 | - |
dc.relation.lastpage | 311 | - |
dc.contributor.id | 10054593 | - |
dc.relation.journal | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS A-PHYSICAL, v.128, no.2, pp.305 - 311 | - |
dc.identifier.wosid | 000236929200012 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 311 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 305 | - |
dc.citation.title | SENSORS AND ACTUATORS A-PHYSICAL | - |
dc.citation.volume | 128 | - |
dc.contributor.affiliatedAuthor | Lee, SJ | - |
dc.identifier.scopusid | 2-s2.0-33645978061 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 3 | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | shear-stress sensors | - |
dc.subject.keywordAuthor | bulk micromachining | - |
dc.subject.keywordAuthor | backside connection | - |
dc.subject.keywordAuthor | frequency response | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
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