DC Field | Value | Language |
---|---|---|
dc.contributor.author | Usung Park | - |
dc.contributor.author | Byoungkyoo Park | - |
dc.contributor.author | Il-Kwon Moon | - |
dc.contributor.author | Kim, D | - |
dc.contributor.author | Kim, J | - |
dc.date.accessioned | 2016-04-01T02:24:28Z | - |
dc.date.available | 2016-04-01T02:24:28Z | - |
dc.date.created | 2011-03-10 | - |
dc.date.issued | 2011-03 | - |
dc.identifier.issn | 0167-9317 | - |
dc.identifier.other | 2011-OAK-0000022837 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/25074 | - |
dc.description.abstract | This paper describes the design, fabrication and testing of a dual-axis micromachined convective accelerometer with a diamond-shaped heater. Modification of heater geometry is advantageous because it is simple and ensures enhanced sensitivity without constraining device size or operating power. The diamond-shaped heater induces active heat flow and a sharp temperature gradient around the heater; together these effects provide high sensitivity. When the fabricated convective accelerometer used SF6 as an enclosed gas medium, its measured sensitivity was 3.5 mV/g when operating power was 7.4 mW and its bandwidth at -3 dB was 25 Hz. (C) 2010 Elsevier B.V. All rights reserved. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.relation.isPartOf | MICROELECTRONIC ENGINEERING | - |
dc.subject | Inertial sensor | - |
dc.subject | Natural heat convection | - |
dc.subject | Micro-electro-mechanical systems (MEMS) | - |
dc.subject | THERMAL ACCELEROMETER | - |
dc.subject | OPTIMIZATION | - |
dc.subject | SENSITIVITY | - |
dc.title | Development of a dual-axis micromachined convective accelerometer with an effective heater geometry | - |
dc.type | Article | - |
dc.contributor.college | 기계공학과 | - |
dc.identifier.doi | 10.1016/J.MEE.2010.11.020 | - |
dc.author.google | Park, U | - |
dc.author.google | Park, B | - |
dc.author.google | Moon, IK | - |
dc.author.google | Kim, D | - |
dc.author.google | Kim, J | - |
dc.relation.volume | 88 | - |
dc.relation.issue | 3 | - |
dc.relation.startpage | 276 | - |
dc.relation.lastpage | 281 | - |
dc.contributor.id | 10191163 | - |
dc.relation.journal | MICROELECTRONIC ENGINEERING | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | MICROELECTRONIC ENGINEERING, v.88, no.3, pp.276 - 281 | - |
dc.identifier.wosid | 000287346800013 | - |
dc.date.tcdate | 2019-02-01 | - |
dc.citation.endPage | 281 | - |
dc.citation.number | 3 | - |
dc.citation.startPage | 276 | - |
dc.citation.title | MICROELECTRONIC ENGINEERING | - |
dc.citation.volume | 88 | - |
dc.contributor.affiliatedAuthor | Kim, D | - |
dc.contributor.affiliatedAuthor | Kim, J | - |
dc.identifier.scopusid | 2-s2.0-78650744696 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 9 | - |
dc.description.scptc | 8 | * |
dc.date.scptcdate | 2018-05-121 | * |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Inertial sensor | - |
dc.subject.keywordAuthor | Natural heat convection | - |
dc.subject.keywordAuthor | Micro-electro-mechanical systems (MEMS) | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Optics | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Optics | - |
dc.relation.journalResearchArea | Physics | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
library@postech.ac.kr Tel: 054-279-2548
Copyrights © by 2017 Pohang University of Science ad Technology All right reserved.