A Layout- and Data-Driven Generic Simulation Model for Semiconductor Fabs

Abstract

Simulation has drawn much attention as an analysis tool because it is often the only tool that has the capability of modeling the details of the semiconductor lines. However, building a simulation model of a semiconductor line is time-consuming and error-prone because of the complexity of the line. This paper proposes a generic simulation modeling framework to reduce the simulation model build time. The framework consists of a layout modeling software called AutoLay and a data-driven generic simulation model called AutoLogic. It can be used to develop an integrated simulation model of production processes and material handling processes in a short period of time. Early users of our framework reported that the initial model building time was reduced from two weeks to a half day.