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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kim, J | - |
| dc.contributor.author | Wenjiang Shen | - |
| dc.contributor.author | Laurent Latorre | - |
| dc.contributor.author | Chang-Jin Kim | - |
| dc.date.accessioned | 2016-04-01T03:27:57Z | - |
| dc.date.available | 2016-04-01T03:27:57Z | - |
| dc.date.created | 2012-04-22 | - |
| dc.date.issued | 2002-04-01 | - |
| dc.identifier.issn | 0924-4247 | - |
| dc.identifier.other | 2002-OAK-0000020128 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/26571 | - |
| dc.description.abstract | This paper presents the use of a microscale liquid-metal droplet as a contact and moving part in a micromechanical switch with electrostatic actuation. Design, FEM analysis, fabrication and testing of the device are reported. The droplet is driven by a given voltage bias that induces electrostatic force between a grounded liquid-metal and an imbedded actuation electrode. The electrodes and the liquid-metal droplet are placed inside of an anisotropically etched silicon cavity. A novel technique to make shadow masks utilizing thin wafers is used to pattern the electrodes inside the silicon cavity. (C) 2002 Elsevier Science B.V. All rights reserved. | - |
| dc.description.statementofresponsibility | X | - |
| dc.language | English | - |
| dc.publisher | Elsevier | - |
| dc.relation.isPartOf | SENSORS AND ACTUATORS A-PHYSICAL | - |
| dc.subject | liquid-metal | - |
| dc.subject | shadow mask | - |
| dc.subject | electrostatic force | - |
| dc.subject | microswitch | - |
| dc.subject | droplet switch | - |
| dc.subject | MERCURY MICRODROP | - |
| dc.title | A micromechanical switch with electrostatically driven liquid-metal droplet | - |
| dc.type | Article | - |
| dc.contributor.college | 기계공학과 | - |
| dc.identifier.doi | 10.1016/S0924-4247(02)00022-5 | - |
| dc.author.google | Kim, J | - |
| dc.author.google | Shen, WJ | - |
| dc.author.google | Latorre, L | - |
| dc.author.google | Kim, CJ | - |
| dc.relation.volume | 97-98 | - |
| dc.relation.startpage | 672 | - |
| dc.relation.lastpage | 679 | - |
| dc.contributor.id | 10191163 | - |
| dc.relation.journal | SENSORS AND ACTUATORS A-PHYSICAL | - |
| dc.relation.index | SCI급, SCOPUS 등재논문 | - |
| dc.relation.sci | SCI | - |
| dc.collections.name | Journal Papers | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | SENSORS AND ACTUATORS A-PHYSICAL, v.97-98, pp.672 - 679 | - |
| dc.identifier.wosid | 000176297000092 | - |
| dc.date.tcdate | 2019-02-01 | - |
| dc.citation.endPage | 679 | - |
| dc.citation.startPage | 672 | - |
| dc.citation.title | SENSORS AND ACTUATORS A-PHYSICAL | - |
| dc.citation.volume | 97-98 | - |
| dc.contributor.affiliatedAuthor | Kim, J | - |
| dc.identifier.scopusid | 2-s2.0-0036544175 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
| dc.description.wostc | 38 | - |
| dc.description.scptc | 38 | * |
| dc.date.scptcdate | 2018-05-121 | * |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.subject.keywordAuthor | liquid-metal | - |
| dc.subject.keywordAuthor | shadow mask | - |
| dc.subject.keywordAuthor | electrostatic force | - |
| dc.subject.keywordAuthor | microswitch | - |
| dc.subject.keywordAuthor | droplet switch | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Instruments & Instrumentation | - |
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- 김준원KIM, JOON WON
- Dept of Mechanical Enginrg