Electron cyclotron resonance plasma source with belt-type magnet assembly and slit antennas

Abstract

An electron cyclotron resonance plasma source with a belt-type magnet assembly and slit antennas was developed for generating high density plasmas at low operating pressures. To enhance plasma confinement and avoid the disadvantages of quartz windows, a continuous arrangement of magnets and direct microwave injection from the slit antennas without quartz windows was used. This plasma source operated at an argon gas pressure of 0.4-1 mTorr and microwave power of 300-800 W. Electron temperature and ion density are dependent on the radial and axial position.