MO-SI MULTILAYER AS SOFT-X-RAY MIRRORS FOR THE WAVELENGTHS AROUND 20 NM REGION

Abstract

Molybdenum-silicon multilayer soft x-ray mirrors have been fabricated using a magnetron sputtering system. Their structures have been characterized by x-ray diffraction and reflectivities at normal incidence have been measured by using monochromatized synchrotron radiation in the 18–24 nm region. A normal incidence reflectivity as high as 40% at 20.8 nm was achieved. © 1994, American Vacuum Society. All rights reserved.