DC Field | Value | Language |
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dc.contributor.author | Lee, BK | - |
dc.contributor.author | Kwon, TH | - |
dc.date.accessioned | 2016-04-01T08:49:27Z | - |
dc.date.available | 2016-04-01T08:49:27Z | - |
dc.date.created | 2009-08-12 | - |
dc.date.issued | 2008-10 | - |
dc.identifier.issn | 0946-7076 | - |
dc.identifier.other | 2008-OAK-0000016766 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/28847 | - |
dc.description.abstract | Two- or multi-level microstructures are getting more important in several applications such as multi-component micro optical elements and various microfluidic systems. In the present study, a simple and efficient method is newly proposed for a fabrication of the two-level polymeric microstructures. Making a mother two-level microstructure consists of two processes: (1) the hot embossing process for a fabrication of microstructures on a PMMA substrate, and (2) the deep X-ray lithography using the hot embossed substrate for a high aspect ratio microstructure fabrication, resulting in a high aspect ratio microstructure containing smaller microstructures on its surface. Making use of so fabricated two-level microstructures as a mother structure, one could achieve a mass replication of the same microstructures via injection molding process with a metallic mold insert obtained by a nickel electroforming onto the mother microstructure. In order to demonstrate the proposed method, a polymeric high aspect ratio microstructure having smaller square microstructures on its top surface was fabricated. The fabricated two-level microstructure shows fine vertical sidewalls, which is a characteristic feature of the deep X-ray lithography. In addition, a metallic mold insert for a mass replication was fabricated by a nickel electroforming process. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | SPRINGER | - |
dc.relation.isPartOf | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
dc.subject | REPLICATION | - |
dc.subject | ARRAYS | - |
dc.title | Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography | - |
dc.type | Article | - |
dc.contributor.college | 기계공학과 | - |
dc.identifier.doi | 10.1007/S00542-007-0 | - |
dc.author.google | Lee, BK | - |
dc.author.google | Kwon, TH | - |
dc.relation.volume | 14 | - |
dc.relation.issue | 40067 | - |
dc.relation.startpage | 1739 | - |
dc.relation.lastpage | 1744 | - |
dc.contributor.id | 10069925 | - |
dc.relation.journal | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Conference Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.14, no.40067, pp.1739 - 1744 | - |
dc.identifier.wosid | 000258455200080 | - |
dc.date.tcdate | 2019-02-01 | - |
dc.citation.endPage | 1744 | - |
dc.citation.number | 40067 | - |
dc.citation.startPage | 1739 | - |
dc.citation.title | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
dc.citation.volume | 14 | - |
dc.contributor.affiliatedAuthor | Kwon, TH | - |
dc.identifier.scopusid | 2-s2.0-49949089647 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 3 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
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