DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, JW | - |
dc.contributor.author | Hwang, KS | - |
dc.contributor.author | Lee, KH | - |
dc.contributor.author | Yi, MY | - |
dc.contributor.author | Lee, MJ | - |
dc.date.accessioned | 2016-04-01T08:54:44Z | - |
dc.date.available | 2016-04-01T08:54:44Z | - |
dc.date.created | 2009-05-26 | - |
dc.date.issued | 2009-01 | - |
dc.identifier.issn | 0169-4243 | - |
dc.identifier.other | 2009-OAK-0000016479 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/29040 | - |
dc.description.abstract | A cryogenic particle beam is an effective means of removing nano-sized contaminant particles, but the particle beam generated with a simple-hole nozzle has not been successful in removing particles smaller than 30 nm. Based on molecular dynamics (MD) simulation results that smaller cryogenic particles moving at a higher velocity are more effective in removing contaminant particles in the 10 nm range, a contoured Laval nozzle of a particular expansion angle and length was used in this study, instead of the simple-hole nozzle, to generate particle beams of high intensity and controlled size moving at high velocities. A variety of particle size and velocity were obtained by controlling the stagnation pressure/temperature and the back pressure, and using Laval nozzles with differing throat sizes and expansion angles. The new particle beams could remove almost completely a variety of ceramic and Cu particles, down to 20 nm size range, on a flat surface or in trenches. (C) Koninklijke Brill NV, Leiden, 2009 | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | BRILL ACADEMIC PUBLISHERS | - |
dc.relation.isPartOf | JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY | - |
dc.subject | Nanoparticle cleaning | - |
dc.subject | cryogenic particle beam | - |
dc.subject | Laval nozzle | - |
dc.subject | NANOPARTICLE REMOVAL | - |
dc.subject | PLASMA | - |
dc.title | REMOVING 20 NM PARTICLES USING A SUPERSONIC ARGON PARTICLE BEAM GENERATED WITH A CONTOURED LAVAL NOZZLE | - |
dc.type | Article | - |
dc.contributor.college | 기계공학과 | - |
dc.identifier.doi | 10.1163/156856108X39 | - |
dc.author.google | Lee, JW | - |
dc.author.google | Hwang, KS | - |
dc.author.google | Lee, KH | - |
dc.author.google | Yi, MY | - |
dc.author.google | Lee, MJ | - |
dc.relation.volume | 23 | - |
dc.relation.issue | 5 | - |
dc.relation.startpage | 769 | - |
dc.relation.lastpage | 777 | - |
dc.contributor.id | 10069926 | - |
dc.relation.journal | JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Journal Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY, v.23, no.5, pp.769 - 777 | - |
dc.identifier.wosid | 000265356800006 | - |
dc.date.tcdate | 2019-02-01 | - |
dc.citation.endPage | 777 | - |
dc.citation.number | 5 | - |
dc.citation.startPage | 769 | - |
dc.citation.title | JOURNAL OF ADHESION SCIENCE AND TECHNOLOGY | - |
dc.citation.volume | 23 | - |
dc.contributor.affiliatedAuthor | Lee, JW | - |
dc.identifier.scopusid | 2-s2.0-67649363916 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 9 | - |
dc.type.docType | Article | - |
dc.subject.keywordAuthor | Nanoparticle cleaning | - |
dc.subject.keywordAuthor | cryogenic particle beam | - |
dc.subject.keywordAuthor | Laval nozzle | - |
dc.relation.journalWebOfScienceCategory | Engineering, Chemical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Mechanics | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Mechanics | - |
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