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유화처리와 광CVD법 질화인막을 이용한 GaAs MISFET 제조 treated GaAs MISFETs with photochemical phosphorus-nitride gate insulators
- Title
- 유화처리와 광CVD법 질화인막을 이용한 GaAs MISFET 제조 treated GaAs MISFETs with photochemical phosphorus-nitride gate insulators
- Authors
- 최기환
- Date Issued
- 1993
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001897731
https://oasis.postech.ac.kr/handle/2014.oak/2961
- Article Type
- Thesis
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