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ALD법으로 성장한 HFO2 박막의 열처리에 따른 특성변화

Title
ALD법으로 성장한 HFO2 박막의 열처리에 따른 특성변화
Authors
이재웅함문호맹완주김형준명재민
POSTECH Authors
김형준
Date Issued
2007-01
Publisher
한국재료학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/30110
ISSN
1225-0562
Article Type
Article
Citation
한국재료학회지, vol. 17, no. 2, page. 96 - 99, 2007-01
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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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