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dc.contributor.author김형준-
dc.date.accessioned2017-07-18T12:28:28Z-
dc.date.available2017-07-18T12:28:28Z-
dc.date.created2009-09-01-
dc.date.issued2006-01-
dc.identifier.issn1229-8700-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/30113-
dc.languageKorean-
dc.publisher한국결정학회-
dc.relation.isPartOf한국결정학회지-
dc.titleALD OF NANOMETAL FILMS AND APPLICATIONS FOR NANOSCALE DEVICES-
dc.typeArticle-
dc.type.rimsART-
dc.identifier.bibliographicCitation한국결정학회지, v.16, no.2, pp.89 - 101-
dc.citation.endPage101-
dc.citation.number2-
dc.citation.startPage89-
dc.citation.title한국결정학회지-
dc.citation.volume16-
dc.contributor.affiliatedAuthor김형준-
dc.description.journalClass2-
dc.description.journalClass2-

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김형준KIM, HYUNGJUN
Dept of Materials Science & Enginrg
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