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반도체 제조업에서 사용되는 수율모델의 비교 및 이용

Title
반도체 제조업에서 사용되는 수율모델의 비교 및 이용
Authors
박광수전치혁김수영
Date Issued
1997-01
Publisher
대한산업공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/30440
ISSN
1225-0996
Article Type
Article
Citation
산업공학, vol. 10, no. 1, page. 79 - 93, 1997-01
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전치혁JUN, CHI HYUCK
Dept of Industrial & Management Enginrg
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