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변동계수를 이용한 반도체 결점 클러스터지표 개발 및 수율예측

Title
변동계수를 이용한 반도체 결점 클러스터지표 개발 및 수율예측
Authors
박항엽전치혁홍유신김수영
POSTECH Authors
전치혁
Date Issued
1995-01
Publisher
대한산업공학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/30611
ISSN
1225-0988
Article Type
Article
Citation
대한산업공학회지, vol. 21, no. 3, page. 371 - 385, 1995-01
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전치혁JUN, CHI HYUCK
Dept of Industrial & Management Enginrg
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