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TIN박막의 증착특성에 미치는 플라즈마 화학증착변수들의 영향
- Title
- TIN박막의 증착특성에 미치는 플라즈마 화학증착변수들의 영향
- POSTECH Authors
- 박찬경
- Date Issued
- 1994-10
- Publisher
- 한국세라믹학회
- ISSN
- 1229-7801
- Article Type
- Article
- Citation
- 한국세라믹학회지, vol. 31, no. 10, page. 1188 - 1196, 1994-10
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Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg