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SI+ 이온주입된 SI 기판의 결함형성 및 회복에 관한 연구
- Title
- SI+ 이온주입된 SI 기판의 결함형성 및 회복에 관한 연구
- Date Issued
- 1994-08
- Publisher
- 대한전자공학회
- ISSN
- 1229-6368
- Article Type
- Article
- Citation
- 전자공학회논문지, vol. 31, no. 8, page. 91.99, 1994-08
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Related Researcher
- 김범만KIM, BUM MAN
- Dept of Electrical Enginrg