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열처리 온도에 따른 SI/CO/GAAS계의 계면반응 및 상평형에 관한 연구
- Title
- 열처리 온도에 따른 SI/CO/GAAS계의 계면반응 및 상평형에 관한 연구
- Date Issued
- 1995-05
- Publisher
- 한국진공학회
- ISSN
- 1225-8822
- Article Type
- Article
- Citation
- 한국진공학회지, vol. 4, no. 1, page. 51 - 59, 1995-05
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Communities & Collection
Related Researcher
- 박찬경PARK, CHAN GYUNG
- Dept of Materials Science & Enginrg