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플라즈마화학증착법에의한 TIN박막밀착력에 TI중간층이 미치는 영향
- Title
- 플라즈마화학증착법에의한 TIN박막밀착력에 TI중간층이 미치는 영향
- POSTECH Authors
- 김선효
- Date Issued
- 1992-01
- Publisher
- 대한금속재료학회 ( 구 대한금속학회 )
- ISSN
- 0253-3847
- Article Type
- Article
- Citation
- 대한금속학회지, vol. 330, no. 12, page. 1438 - 47, 1992-01
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Related Researcher
- 김선효KIM, SEON HYO
- Ferrous & Energy Materials Technology