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DMEAA를 이용한 초고집적 회로용 A1 박막의 유기금속 화학증착법
- Title
- DMEAA를 이용한 초고집적 회로용 A1 박막의 유기금속 화학증착법
- Authors
- 이기호
- Date Issued
- 1995
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898104
https://oasis.postech.ac.kr/handle/2014.oak/3333
- Article Type
- Thesis
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