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플라즈마 화학증착법에 의한 SI3N4박막 제조
- Title
- 플라즈마 화학증착법에 의한 SI3N4박막 제조
- Date Issued
- 1989-01
- Publisher
- .
- ISSN
- 1226-4873
- Article Type
- Article
- Citation
- 연구기보, vol. 3, no. 4, page. 79 - 83, 1989-01
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Communities & Collection
Related Researcher
- 제정호JE, JUNG HO
- Dept of Materials Science & Enginrg