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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Lee, SH | - |
| dc.contributor.author | Kang, HW | - |
| dc.contributor.author | Cho, DW | - |
| dc.contributor.author | Moon, W | - |
| dc.date.accessioned | 2017-07-19T06:54:19Z | - |
| dc.date.available | 2017-07-19T06:54:19Z | - |
| dc.date.created | 2009-08-21 | - |
| dc.date.issued | 2007-03 | - |
| dc.identifier.issn | 0946-7076 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/33877 | - |
| dc.language | English | - |
| dc.publisher | SPRINGER | - |
| dc.relation.isPartOf | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
| dc.subject | SILICON | - |
| dc.title | Study on the method for the reliability test of focused ion beam | - |
| dc.type | Article | - |
| dc.identifier.doi | 10.1007/s00542-006-0227-7 | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, v.13, no.5-6, pp.569 - 577 | - |
| dc.identifier.wosid | 000244690500025 | - |
| dc.date.tcdate | 2019-03-01 | - |
| dc.citation.endPage | 577 | - |
| dc.citation.number | 5-6 | - |
| dc.citation.startPage | 569 | - |
| dc.citation.title | MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | - |
| dc.citation.volume | 13 | - |
| dc.contributor.affiliatedAuthor | Cho, DW | - |
| dc.contributor.affiliatedAuthor | Moon, W | - |
| dc.identifier.scopusid | 2-s2.0-33847269129 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
| dc.description.wostc | 3 | - |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
| dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Engineering | - |
| dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Physics | - |
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Related Researcher
- 조동우CHO, DONG WOO
- Dept of Mechanical Enginrg