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산화규소 표면위에서 WF6-SIH4 화학증착에 의한 텅스텐 핵의 생성
- Title
- 산화규소 표면위에서 WF6-SIH4 화학증착에 의한 텅스텐 핵의 생성
- Date Issued
- 1992-01
- Publisher
- 한국재료학회
- ISSN
- 1225-0562
- Article Type
- Article
- Citation
- 한국재료학회지, vol. 2, no. 1, page. 19 - 26, 1992-01
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Communities & Collection
Related Researcher
- 이건홍LEE, KUN HONG
- Dept. of Chemical Enginrg