Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers
SCIE
SCOPUS
- Title
- Removal of oxides from copper surface using femtosecond and nanosecond pulsed lasers
- Authors
- Seo, C; Ahn, D; Kim, D
- Date Issued
- 2015-09-15
- Publisher
- ELSEVIER SCIENCE BV
- Abstract
- We analyzed the process of using femtosecond and nanosecond pulsed lasers for removing the oxide layer from bulk copper and optimized the process parameters. A femtosecond laser (Ti:Sapphire) and two nanosecond lasers (Nd:YAG, excimer) were used to remove oxide layers composed of cupric oxide (CuO) and cuprous oxide (Cu2O) from copper. Femtosecond laser ablation reduced the thickness of native oxide layers to <20 nm with no significant thermal side effects. Nanosecond laser ablation removed a substantial portion of the oxides but thermal side effects such as surface melting and resolidification generated re-oxidation layers on the order of 100-nm thick. (C) 2015 Elsevier B.V. All rights reserved.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/35662
- DOI
- 10.1016/J.APSUSC.2015.05.011
- ISSN
- 0169-4332
- Article Type
- Article
- Citation
- APPLIED SURFACE SCIENCE, vol. 349, page. 361 - 367, 2015-09-15
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