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스퍼터링법에 의해 증착된 TiN 박막의 우선방위 현상

Title
스퍼터링법에 의해 증착된 TiN 박막의 우선방위 현상
Authors
양희홍
Date Issued
1995
Publisher
포항공과대학교
URI
http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898440
https://oasis.postech.ac.kr/handle/2014.oak/3669
Article Type
Thesis
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