Thesis
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 김동환 | en_US |
| dc.date.accessioned | 2015-02-24T13:58:54Z | - |
| dc.date.available | 2015-02-24T13:58:54Z | - |
| dc.date.issued | 1995 | en_US |
| dc.identifier.other | OAK-2015-01349 | en_US |
| dc.identifier.uri | http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898500 | en_US |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/3729 | - |
| dc.description | Master | en_US |
| dc.language | kor | en_US |
| dc.publisher | 포항공과대학교 | en_US |
| dc.rights | BY_NC_ND | en_US |
| dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
| dc.title | 원거리 플라즈마 화학증착을 이용한 저온 규소 박막의 결정성 | en_US |
| dc.title.alternative | The Crystallinity of silicon films deposited at low temperatures with remote plasma enhanced chemical vapor deposition (RPECVD) | en_US |
| dc.type | Thesis | en_US |
| dc.contributor.college | 일반대학원 화학공학과 | en_US |
| dc.date.degree | 1995-02 | en_US |
| dc.type.docType | Thesis | - |
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