Thesis
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
플라즈마 건식식각장비의 반응로 해석
- Title
- 플라즈마 건식식각장비의 반응로 해석
- Authors
- 박종철
- Date Issued
- 1995
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898629
https://oasis.postech.ac.kr/handle/2014.oak/3858
- Article Type
- Thesis
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.