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Article
A simulation-based semiconductor chip yield model incorporating a new defect cluster index
SCIE
SCOPUS
MICROELECTRONICS RELIABILITY, vol. 39, no. 4, page. 451 - 456, 1999-04
Jun, CH
;
Hong, YS
;
Kim, SY
;
Park, KS
;
Park, H
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cluster
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regression
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semiconductor yield
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1999
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MICROELECTRONICS RELIABILITY
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