Study of a Macrodefect in a Silicon Carbid Single Crystal by Means of X-Ray Phase Contrast
SCIE
SCOPUS
- Title
- Study of a Macrodefect in a Silicon Carbid Single Crystal by Means of X-Ray Phase Contrast
- Authors
- Argunova, TS; Kohn, VG; Lim, JH; Je, JH
- Date Issued
- 2016-11
- Publisher
- MAIK NAUKA/INTERPERIODICA/SPRINGER
- Abstract
- The morphology of a macrodefect in a single-crystal silicon carbide wafer has been investigated by the computer simulation of an experimental X-ray phase-contrast image. A micropipe, i.e., a long cavity with a small (elliptical in the general case) cross section, in a single crystal has been considered as a macrodefect. A far-field image of micropipe has been measured with the aid of synchrotron radiation without a monochromator. The parameters of micropipe elliptical cross section are determined based on one projection in two directions: parallel and perpendicular to the X-ray beam propagation direction, when scanning along the pipe axis. The results demonstrate the efficiency of the phase contrast method supplemented with computer simulation for studying such macrodefects when the defect position in the sample volume is unknown before-hand.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/39233
- DOI
- 10.1134/S1063774516040027
- ISSN
- 1063-7745
- Article Type
- Article
- Citation
- CRYSTALLOGRAPHY REPORTS, vol. 61, no. 6, page. 914 - 917, 2016-11
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.