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Article
Quantitative structure and property analysis of nanoporous low dielectric constant SiCOH thin films
SCIE
SCOPUS
JOURNAL OF PHYSICAL CHEMISTRY C, vol. 111, no. 29, page. 10848 - 10854, 2007-07-26
Heo, K
;
Park, SG
;
Yoon, J
;
Jin, KS
;
Jin, S
;
Rhee, SW
;
Ree, M
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