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Article
Imprinting well-controlled closed-nanopores in spin-on polymeric dielectric thin films
SCIE
SCOPUS
JOURNAL OF MATERIALS CHEMISTRY, vol. 16, no. 7, page. 685 - 697, 2006-02-21
Ree, MH
;
Yoon, JW
;
Heo, KY
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CHAIN ORIENTATION
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CONSTANT MATERIALS
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KAPPA POLYIMIDE FILMS
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METHYL-METHACRYLATE
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MICROELECTRONIC APPLICATIONS
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ORGANIC/INORGANIC HYBRID NANOCOMP...
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POLY(AMIC ACID)S
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RESIDUAL-STRESS BEHAVIOR
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TRANSFER RADICAL POLYMERIZATION
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2006
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scie
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