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Helicon Wave Plasma CVD 법에 의해 제조된 c-BN 박막의 안정화helicon wave plasma CVD
- Title
- Helicon Wave Plasma CVD 법에 의해 제조된 c-BN 박막의 안정화helicon wave plasma CVD
- Authors
- 김경보
- Date Issued
- 1996
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898721
https://oasis.postech.ac.kr/handle/2014.oak/3950
- Article Type
- Thesis
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