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CATALYTIC CHAIN LENGTH AND CHARACTERISTIC IN A CHEMICAL AMPLIFICATION PHOTORESIST USING SULFONATE PHOTOACID GENERATOR
- Title
- CATALYTIC CHAIN LENGTH AND CHARACTERISTIC IN A CHEMICAL AMPLIFICATION PHOTORESIST USING SULFONATE PHOTOACID GENERATOR
- POSTECH Authors
- 박찬언
- Date Issued
- 1993-01
- Publisher
- 한국고분자학회
- ISSN
- 0379-153X
- Article Type
- Article
- Citation
- POLYMER-KOREA, vol. 17, no. 3, 1993-01
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Related Researcher
- 박찬언PARK, CHAN EON
- Dept. of Chemical Enginrg