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ION IMPLANTATION USING PLASMA SHEATH
- Title
- ION IMPLANTATION USING PLASMA SHEATH
- Authors
- cho mh
- Date Issued
- 1990-01
- Publisher
- 한국표면공학회
- ISSN
- 1225-8024
- Article Type
- Article
- Citation
- 한국표면공학회지, vol. 23, no. 1, page. 1 - 7, 1990-01
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Related Researcher
- 조무현CHO, MOO HYUN
- Div. of Advanced Nuclear Enginrg