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PHOTO-INDUCED CHEMICAL VAPOR DEPOSITION OF SIO2 THIN FILM BY DIRECT EXCITATION PROCESS
- Title
- PHOTO-INDUCED CHEMICAL VAPOR DEPOSITION OF SIO2 THIN FILM BY DIRECT EXCITATION PROCESS
- Date Issued
- 1989-07
- Publisher
- J. OF KITE (전자공학회논문지)
- ISSN
- 1229-6368
- Article Type
- Article
- Citation
- 전자공학회논문지, vol. 26, page. 1025 - 1034, 1989-07
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Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg