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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 강봉구 | - |
| dc.contributor.author | 박성호 | - |
| dc.contributor.author | 전영진 | - |
| dc.date.accessioned | 2018-01-08T11:19:05Z | - |
| dc.date.available | 2018-01-08T11:19:05Z | - |
| dc.date.created | 2009-08-14 | - |
| dc.date.issued | 1989-01 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/40164 | - |
| dc.language | English | - |
| dc.publisher | J. of KITE | - |
| dc.relation.isPartOf | J. of KITE | - |
| dc.title | Design parameter analysis for a planar type reactive ion etcher | - |
| dc.type | Article | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | J. of KITE, v.26, pp.1658 - 1666 | - |
| dc.citation.endPage | 1666 | - |
| dc.citation.startPage | 1658 | - |
| dc.citation.title | J. of KITE | - |
| dc.citation.volume | 26 | - |
| dc.contributor.affiliatedAuthor | 강봉구 | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg