Full metadata record
DC Field | Value | Language |
dc.contributor.author | T. Kailath | - |
dc.contributor.author | C. Schaper | - |
dc.contributor.author | Y. Cho | - |
dc.contributor.author | P. Gyugyi | - |
dc.contributor.author | S. Norman | - |
dc.contributor.author | P. Park | - |
dc.contributor.author | S. Boyd | - |
dc.contributor.author | G. Franklin | - |
dc.contributor.author | K. Saraswat | - |
dc.contributor.author | M. | - |
dc.date.accessioned | 2018-01-09T04:11:43Z | - |
dc.date.available | 2018-01-09T04:11:43Z | - |
dc.date.created | 2009-03-26 | - |
dc.date.issued | 1996-01 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/40372 | - |
dc.language | English | - |
dc.publisher | CRC PRESS | - |
dc.relation.isPartOf | THE CONTROL HANDBOOK | - |
dc.title | CONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | THE CONTROL HANDBOOK, pp.1243 - 1259 | - |
dc.citation.endPage | 1259 | - |
dc.citation.startPage | 1243 | - |
dc.citation.title | THE CONTROL HANDBOOK | - |
dc.contributor.affiliatedAuthor | P. Park | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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