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dc.contributor.authorT. Kailath-
dc.contributor.authorC. Schaper-
dc.contributor.authorY. Cho-
dc.contributor.authorP. Gyugyi-
dc.contributor.authorS. Norman-
dc.contributor.authorP. Park-
dc.contributor.authorS. Boyd-
dc.contributor.authorG. Franklin-
dc.contributor.authorK. Saraswat-
dc.contributor.authorM.-
dc.date.accessioned2018-01-09T04:11:43Z-
dc.date.available2018-01-09T04:11:43Z-
dc.date.created2009-03-26-
dc.date.issued1996-01-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/40372-
dc.languageEnglish-
dc.publisherCRC PRESS-
dc.relation.isPartOfTHE CONTROL HANDBOOK-
dc.titleCONTROL FOR ADVANCED SEMI-CONDUCTOR DEVICE MANUFACTURING-
dc.typeArticle-
dc.type.rimsART-
dc.identifier.bibliographicCitationTHE CONTROL HANDBOOK, pp.1243 - 1259-
dc.citation.endPage1259-
dc.citation.startPage1243-
dc.citation.titleTHE CONTROL HANDBOOK-
dc.contributor.affiliatedAuthorP. Park-
dc.description.journalClass1-
dc.description.journalClass1-

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