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Department of Materials Science & Engineering (신소재공학과)
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Article
Dependence of electrical properties on interfacial layer of Ta2O5 films
SCIE
SCOPUS
MICROELECTRONIC ENGINEERING, vol. 84, no. 12, page. 2865 - 2868, 2007-12
Lee, JW
;
Ham, MH
;
Maeng, WJ
;
Kim, H
;
Myoung, JM
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DIELECTRICS
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HFO2
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high-resolution transmission elec...
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interfacial layer
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MOLECULAR-BEAM EPITAXY
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SI
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tantalum oxide
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X-ray photoelectron spectroscopy
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2007
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