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Browsing "Department of Mechanical Engineering (기계공학과)" by  SubjectNano-bullet

전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하
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Showing results 1 to 3 of 3
Article
Removal of 10-nm contaminant particles from Si wafers using argon bullet particlesSCIESCOPUS

JOURNAL OF NANOPARTICLE RESEARCH, vol. 13, no. 10, page. 4979 - 4986, 2011-10

Article
Removal of 10-nm contaminant particles from Si wafers using CO2 bullet particlesSCIESCOPUS

NANOSCALE RESEARCH LETTERS, vol. 7, no. 1, 2012-04-11

Article
The removal of 10-nm contaminant particles from micron-scale trenches using CO2 nano bulletsSCIESCOPUS

JOURNAL OF NANOPARTICLE RESEARCH, vol. 15, no. 4, 2013-04

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