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다결정 실리콘-게르마늄 TFT 저온공정개발과 이를 이용한 상abrication of Rapid-Thermal CVD Polycrystalline Silicon-Germanium CMOS TFT
- Title
- 다결정 실리콘-게르마늄 TFT 저온공정개발과 이를 이용한 상abrication of Rapid-Thermal CVD Polycrystalline Silicon-Germanium CMOS TFT
- Authors
- 최성민
- Date Issued
- 1996
- Publisher
- 포항공과대학교
- URI
- http://postech.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000001898852
https://oasis.postech.ac.kr/handle/2014.oak/4081
- Article Type
- Thesis
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