DC Field | Value | Language |
---|---|---|
dc.contributor.author | KIM, JAE NAM | - |
dc.contributor.author | KIM, KYUNG JOONG | - |
dc.contributor.author | KIM, HYUN KYUNG | - |
dc.contributor.author | MOON, DAE WON | - |
dc.contributor.author | HONG, TAE EN | - |
dc.contributor.author | JEONG, CHIL SUNG | - |
dc.contributor.author | KIM, YI KYUNG | - |
dc.contributor.author | LIM CEOL HO | - |
dc.contributor.author | KIM, JEONG HO | - |
dc.date.accessioned | 2018-01-09T09:04:13Z | - |
dc.date.available | 2018-01-09T09:04:13Z | - |
dc.date.created | 2017-11-10 | - |
dc.date.issued | 2002-12 | - |
dc.identifier.issn | 2288-6559 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/40851 | - |
dc.description.abstract | A domestic round robin test(RRT) for the quantitative analysis of minor impurities was performed by a standard procedure and standard reference material. The certified reference material(CRM)s for B-doped Si thin film and analysis specimens and the analysis specimens were prepared by an ion beam sputter deposition method. These samples were certified by inductively coupled plasma mass spectrometry(ICP-MS) with isotope dilution method which is one of the most quantitative methods in chemical analysis. By using an international standard procedure(ISO/DIS-14237) for the quantitative analysis of B in Si by SIMS, a domestic RRT was performed for these specimens. Although only a few laboratories participated in this RRT, the average B concentration well agreed with the certified value within 2% error. | - |
dc.language | Korean | - |
dc.publisher | 한국진공학회 | - |
dc.relation.isPartOf | 한국진공학회지 | - |
dc.title | 실리콘에 도핑된 붕소의 정량분석에 대한 공동분석연구 | - |
dc.title.alternative | RRT Study for the Quantitative Analysis of Boron in Silicon | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | 한국진공학회지, v.11, no.4, pp.218 - 224 | - |
dc.identifier.kciid | ART001204623 | - |
dc.citation.endPage | 224 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 218 | - |
dc.citation.title | 한국진공학회지 | - |
dc.citation.volume | 11 | - |
dc.contributor.affiliatedAuthor | KIM, JAE NAM | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
dc.type.docType | ARTICLE | - |
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