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Department of Mechanical Engineering (기계공학과)
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Article
Fabrication of three-dimensional suspended, interlayered and hierarchical nanostructures by accuracy-improved electron beam lithography overlay
SCIE
SCOPUS
SCIENTIFIC REPORTS, vol. 7, no. 6668, page. 1 - 8, 2017-07
Gwanho Yoon
;
Inki Kim
;
Sunae So
;
Jungho Mun
;
Minkyung Kim
;
Rho, J.
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