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Department of Mechanical Engineering (기계공학과)
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Item hits:
Article
Maskless Plasmonic Lithography at 22 nm Resolution
SCIE
SCOPUS
SCIENTIFIC REPORTS, vol. 1, no. 175, 2011-11-29
Pan, L
;
Park, Y
;
Xiong, Y
;
Ulin-Avila, E
;
Wang, Y
;
Zeng, L
;
Xiong, SM
;
Rho, J
;
Sun, C
;
Bogy, DB
;
Zhang, X
1
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CONFINEMENT
1
DIFFRACTION LIMIT
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HIGH TRANSMISSION
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NANOANTENNA
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NANOLITHOGRAPHY
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NEAR-FIELD
1
OPTICAL LITHOGRAPHY
1
PHOTOLITHOGRAPHY
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WAVE-GUIDES
1
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scie
1
scopus
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